Today's scanning electron microscopes achieve ∼2-nm spot diameters at landing energies low enough that only the top few nanometers of the block's surface contributes substantially to the acquired ...
An example of a correlative study between XRM and FIB-SEM has been presented in an earlier study. 1 This article will expand the correlation one step beneath the length scale to link FIB-SEM and TEM, ...
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Zeiss's Auriga combines Trumpf's pulsed micro-focus laser for ablation with established FIB-SEM technology to enable "novel testing techniques". Carl Zeiss has launched the Auriga Laser, which ...
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Multiple innovations in semiconductor processing are needed to enable 3D NAND bit density increases of about 30% per year at ever-decreasing cost per bit, all of which will be required to meet the ...
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