BELMONT, Calif. — Nikon has introduced the NSR-S208D, a KrF scanner for mass production of 110-nm or smaller devices. The system combines a projection lens with a numerical aperture of 0.82 and ...
With krypton fluoride (KrF) scanners used for the majority of 110nm to 65nm advanced scanner applications, Nikon Precision Inc. rolled out its NSR-S208D KrF scanner in an effort to address this market ...
LAKE SUCCESS, N.Y.--(BUSINESS WIRE)--Canon U.S.A., Inc., a leader in digital imaging solutions, recently announced that it has commenced sales of the new FPA-6300ES6a Deep Ultra-Violet (DUV) scanner, ...
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